MEMS Accelerometer Working Principle | How It Works Explained

📌 What is a MEMS Accelerometer?

A MEMS (Micro-Electro-Mechanical Systems) accelerometer is a tiny sensor that measures acceleration based on the movement of internal microstructures. It operates using mechanical motion detection and capacitive sensing to convert motion into readable electrical signals.

⚙️ Structure of MEMS Accelerometer

The main components of a MEMS accelerometer include:

• Proof Mass – A small suspended mass that responds to external acceleration.
• Suspension System – Micro-springs or beams that allow the proof mass to move while keeping it centered.
• Fixed Electrodes – Stationary capacitive plates that form a capacitor with the proof mass.
• Sensing Circuitry – Detects changes in capacitance and converts them into electrical signals.

🔍 Working Principle

1. Acceleration Applied: When acceleration is applied, the proof mass shifts due to inertia.
2. Capacitance Change: The distance between the moving mass and fixed electrodes changes, altering the capacitance.
3. Signal Detection: The sensing circuit detects this change and outputs a voltage proportional to the acceleration.
4. Axis Measurement: Typically, accelerometers measure motion across X, Y, and Z axes.

📷 Illustration

📽️ Video Demonstration

🚀 Applications of MEMS Accelerometers

• Smartphones: Screen rotation, step counting, and motion detection.
• Automotive: Crash detection, airbag systems, and navigation support.
• Wearables: Fitness tracking and gesture control.
• Industrial: Vibration monitoring, tilt detection, and machine diagnostics.